Hexafluoro-1,3-butadiene
Hexafluorobutadiene has a very low global warming potential (GWP) and a short atmospheric lifetime, making it a substance with very low environmental impact.
Hexafluoro-1,3-butadiene (C4F6) has a very low global warming potential (GWP) and a short atmospheric lifetime, resulting in a very small environmental impact. It is characterized by a fast etching rate, high selectivity, and precision, making it suitable for high aspect ratio semiconductor etching processes in the fine processing of silicon oxide films. Additionally, it is used as a raw material in the development of fluorine-based functional materials in organic synthesis.
- Company：UniPo
- Price：10,000 yen-100,000 yen
